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Benchmark's Visual Diagnostic Test Reticles are widely accepted and endorsed by both semiconductor manufacturers and equipment vendors, to rapidly determine stepper best focus without the use of a microscope. With these reticles, optimum focus can be found more quickly and with half the variability of conventional microscope linewidth measurement methods.
Additional Features and Benefits include:
Visual Diagnostic Test Reticles are used for measuring:
Full Field Visual Diagnostic Test Reticle
Benchmark's Full Field Test Reticle is used to create a focus/exposure matrix with best focus at the center. As energy increases, resist test structures clear out at extreme focus positions of the matrix. The resulting image resembles a histogram plot with a peak indicating the best focus setting, that can aid in determining coating nonuniformity and identifying hot spots.
D-2 Test Reticle
Benchmark's D-2 Test Reticle is used to evaluate illumination uniformity, wafer chuck effects, development and soft bake uniformity, and dose matching.
D-3 Test Reticle
Benchmark's D-3 Test Reticle is used to determine dose matching, and to evaluate focal plane tilt, wafer leveling, and column alignment.
D-5 Test Reticle
Benchmark's D-5 Test Reticle is used to evaluate fixed dose (focus matrix only), and is suitable for a variety of NA's.
Contact Benchmark today to learn more about Visual Diagnostic Test Reticles.