Our PSFM Data!™ Focus Analysis software package is specifically designed to be used with our Phase Shift Focus Monitor Reticle. The software frees the user from working with spreadsheets and provides many functions to the user. The software can parse the output from most overlay tools currently in use in the semiconductor industry and convert it to meaningful focus information.
User Inputs:
Function:
System:
Results:
Command line version available:
In addition to the graphical user interface version described above, we have also developed a command line version that fully integrates calibration and routine focus monitoring into the fab statistical process control system.
For more information on either version of PSFM Data!™, please contact us.