Products
Test Reticles
Benchmark is the world’s leading independent supplier of test reticles for lithography systems. For almost four decades, our test reticles have been used by wafer fabs, and materials and fab equipment suppliers to optimize and monitor lithography performance and processes.
Grayscale Masks and Filters
Benchmark designs and sources fabrication of grayscale masks for both lithography and light filtering applications.
Grating and Phasemasks
Benchmark provides e-beam enabled grating masks and replication masters using its proprietary design techniques.
Calibration Wafers
Benchmark offers its own design for silicon position calibration at 200 and 300mm. Custom designs, other materials and sizes are also feasible.
Quantitative Phase Target
Benchmark’s quantitative phase target (QPT) enables phase-only z-axis calibration for quantitative phase imaging systems.
Software Products
Benchmark provides analysis software packages to enhance its test reticle offerings such as Phase Shift Focus Monitor and Universal matching reticles. These packages can also be enhanced and integrated for routine tool monitoring.
