Position Calibration Wafers

Benchmark can provide custom position calibration wafers and glass plates for set up and monitoring of precision stages for a variety of applications.  These products are customized based on the needs of each customer for your specific application.

·         Substrate Sizes

o   Silicon – Diameters  300mm, 200mm, 150mm, 100mm

o   Borofloat – Diameters  300mm, 200mm, 150mm, 100mm

                      Square sizes to 330mm X 330mm

o   Quartz  – Diameters  300mm, 200mm, 150mm, 100mm

                      Square sizes to 500mm X 500mm

Other sizes possible on request – please contact us

·         Films/Substrates

o   Chrome on borofloat, quartz or silicon

o   Aluminum on silicon or quartz

o   SiO2 or SiN on silicon

o   Bulk Silicon  

 

 

 

Benchmark can offer the option of precision position metrology for wafer sizes up to 300mm with better than 50nm uncertainty if requested. Please contact us for more information