Benchmark Technologies Auto PSFM software package developed out of our customer desires to take the benefits of PSFM Data from the individual engineering workstation and integrate them directly into the fab facility automated statistical process control systems. The software has been implemented at multiple customer locations, where the Phase Shift Focus Monitor technology is used for robust frequent monitoring.

Auto PSFM is an upgrade to PSFM Data!,and is available to new and established users. For more information about Auto PSFM please contact us.