A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

A
astigmatism an optical condition in which a lens is able to resolve (resolution as defined by the Rayleigh criterion) a line in say the "X" direction but not in the "Y" direction.

C
coma the inability of a lens to resolve a point of light as a circle. Instead the point takes the shape of a comet (hence the name "coma). This manifests itself as the inability to resolve patterns such contact points.


contact array a rectilinear array of square patterns typically used to measure optical

D
dark field module

E
edge slope phenomenon

F
focus star

G
grating

H
interlocked step coverage

I
linearity evaluation

O
optical proximity effects

P
pitch

R
Rayleigh criterion the minimum resolved distance between the two peaks of two Airy intensity distributions. Where the peak of one distribution is aligned with the 1st diffraction order of the 2nd distribution. If the two peaks cannot be resolved they form a blurred image that resembles a "figure 8".

resist adhesion
resolution bars
resolution forks
resolution L bars

S
scumming
step coverage matrix