Universal MatchingTest Reticle

Benchmark's Universal Matching Reticles provide system-to-system matching for virtually all types of stepper equipment:

• Measures grid and field matching errors
• Matches tools of the same manufacturer, different manufacturers and lens types
• Measurements in 1 mm increments across the field
• High precision single and multiple sets are upwards compatible - match present steppers to new equipment prior to purchase, or qualify against existing tools

Various Metrology Options include:

• Built-in stepper metrology (KLA, IVS, Prometrix, Bio-Rad, Nanometrics, OSI, etc.)
• SEM customized design options
• Test cell layout assures correct alignment mark location, orientation and polarity
• Field compatibility (die fit); optimized between 1X and reduction systems to accommodate various field sizes, orientations and wafer flats
• Multiple field alignment from one system onto a single field of another system

Contact Benchmark Technologies today to learn more about Universal Matching Reticles.