Which Reticle Do You Need?
Take
a look at the table below, and learn which of our reticles will make your
process more efficient and profitable.
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Wafer
& Chuck Flatness
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Field
Tilt & Curv.
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Lens
Heating
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Astig/
Coma |
Focus
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Exposure
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Illum.
Uniformity
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Illum.
Coherence
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Proximity
Effects
|
Overlay
Matching |
Res.
|
Notching
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