EZProbe Reticles

Benchmark’s EZProbe Reticles contain electrical linewidths and contact measurements for rapid evaluation of critical dimensions. Structures are probable on all electrical metrology systems.

The EZProbe Reticle performs accurate wafer characterization and critical production monitoring at substantially greater speeds and repeatability than conventional methods.

Designed to meet customer needs for advanced process control systems, the EZProbe Reticle addresses a wide variety of process applications where film thickness and sheet resistance are critical.

Features

• OPC and phase shift designs available
• Custom designs available
• Automated data collection using standard probing equipment

Applications

• Focus
• Exposure
• Resolution

Contact Benchmark Technologies today for more information about the EZProbe Reticle.