4X/5X Matching Reticle

As more 4X reduction step-and-scan systems make their way into today's fabs, there is an increasing need to match these new systems to currently installed 5X steppers. Benchmark’s proprietary breakthrough in matching technology allows matching of 4X and 5X lithography tools using a single reticle.

Our 4X/5X Matching Reticle provides the tightest match between two different tools, even those from differing manufacturers.

4X/5X Matching Reticles are available for virtually all stepper types and models.

Features

• Single reticle optimizes concentric matching
• Provides tightest matching possible for 4X and 5X systems
• Eliminates reticle-to-reticle variations
• Measures grid and field matching errors
• Uses automated metrology methods

Applications

• Match tools of the same manufactuers or of differing manufacturers, models and lens types
• Evaluate matchability between existing and new equipment prior to purchase

For more information about the Matching Reticle, contact us.