PSFM DATA!^TM Focus Analysis Software included modules:

• Data Analysis Module (PSFM Reticle Calibration and Daily Monitoring)

• Automation Tool for FAB SPC Module (Automatic Data Processing / SPC Uploading)

Data Analysis Module (PSFM Reticle Calibration and Daily Monitoring)

User Inputs:

• Raw ascii metrology data / litho tool job file

• User defined focus/dose data

• Interactive specification of exposure parameters

Function:

• Process PSFM overlay data automatically

• Easy-to-use focus/dose assignment function

• PSFM calibration and focus monitor

• Focus, tilt, astigmatism analysis and more …

System Requirements:

• No spreadsheet software required

• Works on multiple operating systems

Results:

• Output data in csv or ascii format

• Calibration templates for SPC monitor

• Focus, tilt, curvature, astigmatism, flatness, edge-center comparison
   

Automation Tool for FAB SPC Module (Automatic Data Processing / SPC Uploading)

This is a fully automatic PSFM focus data analysis, report generation and result uploading software package. It is designed for wafer fabs which need to automate the monitoring of litho tool performance.

Function:

• Automatically download new overlay data from metrology system

• Calculate focus, tilt, curvature, astigmatism, etc.

• Prepare analysis reports

• Upload results to FAB SPC server

• Monitor multiple litho tools

See Automation Tool Presentation.