SPIE Advanced Lithography

February 28 - March 1, 2017   

Booth #222

San Jose Convention Center

San Jose, CA

Semicon China

March 14 - 16, 2017   

Booth #5323 with Hermes Epitek

Shanghai New International Expo Centre

Shanghai, CHINA


Benchmark is the world's leading independent supplier of test reticles for lithography systems. For 3 decades, our products have been used by wafer fabs and  fab equipment and materials suppliers to optimize and monitor lithography tool performance and processes.

Benchmark also provides conventional mask and reticle design services as a primary source or as a backup to our customers' internal capability. As part of this turnkey activity we also provide for mask and reticle manufacturing.

Benchmark can also provide many custom fabrication services that leverage our deep understanding of design layout and the exceptional patterning capability of semiconductor industry infrastructure. 

Find out more about us.



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